Improved electrical properties of tin-oxide fi lms by using ultralow-pressure sputtering process

Title Improved electrical properties of tin-oxide fi lms by using ultralow-pressure sputtering process
Author: Soo, Myung; Seop, Bong; Lee, Joohei; Heo, Jaeyeong; Jin, Sang & Yoon, Kapsoo
Thin Solid Films, Elsevier B.V. 2009
2009
http://dx.doi.org/10.1016/j.tsf.2009.05.051
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