Effect of substrate temperature on the electrical and optical properties of reactively evaporated indium tin oxide films

Title Effect of substrate temperature on the electrical and optical properties of reactively evaporated indium tin oxide films
Author: Balasubramanian, N & Subrahmanyam, A
Materials Science & Engineering B: Solid-State Materials for Advanced Technology, 1988
1988
http://dx.doi.org/10.1016/0921-5107(88)90008-6
More details: Electrical and optical properties of indium tin oxide films (ITO) coated on soda-lime glass substrates have been investigated as a function of substrate temperature. Highly conducting and transparent films have been obtained at a substrate temperature of 350\°C and above. An increase in carrier concentration accompanied by a widening in optical band gap (the Burstein-Moss shift) have been observed with increasing substrate temperature. Enhancement of carrier concentration at higher substrate temperatures may be attributed to the presence of higher valency states of tin (Sn4+) occupying the indium sublattice of indium oxide. Previous reports indicate that ITO/Si heterojunction has extremely good photovoltaic properties.Films--Chemical Vapor Deposition;Electric Properti

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