Thin Film Mechanics

Title Thin Film Mechanics
Author: Vlassak, Joost
Harvard University, 2004
2004 AP298presentation.pdf
More details: 1. Origin of residual stresses in thin films Epitaxial stresses Thermal stresses Intrinsic or growth stresses - surface stress effects - crystallite coalescence - grain growth - vacancy annihilation - effect of impurities - effect of phase transformations - stresses in sputtered films 2. Deformation processes in thin films Grain boundary diffusion controlled creep Dislocation mechanisms

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