Transparent Indium Tin Oxide Films Prepared by Reactive Thermal Evaporation in the UC Berkely Microlab

Title Transparent Indium Tin Oxide Films Prepared by Reactive Thermal Evaporation in the UC Berkely Microlab
Author: Queen, DR & Morford, J
UC Berkeley Microfabrication Laboratory, 2009
2009
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More details: Transparent, conducting thin films of indium tin oxide (ITO) have been prepared by reactive thermal evaporation. Films grown from an InSn (10 wt. \%) source at 175??C in 0.32 mTorr of O2 gas have resistivity of 2.4?�10-4 ?� cm and transparency greater than 95\% over the visible spectrum. Film